E-Beam Heating Station for Flag Style Sample Holder Plates in Ultra-High Vacuum (UHV)

Composed of an E-Beam heating stage for SHOM samle holders, this fully configured assembly is completely mounted on a DN40CF (2.75") flange, including wiring and electrical feedthroughs.

This provides complete and customizable, ready to use solution for sample heating/ annealing under UHV conditions up to 2000°C.

• Linear/Rotary Feedthrough:
  • standard lengths for linear travel: 100mm, 200mm
  • linear force: 30N
  • rotation:
    • angle: +/- 166.75° deg
    • torque: 0.5Nm
  • bakeout temperature: 150deg C max.
  • pressure range 1E-11mbar to 1000mbar
• Receiver orientation options:
  • Orientation 01 (flag perpendicular to axis)
  • Orientation 02 (flag perpendicular to axis, straight)
  • Orientation 03 (flag in-line with axis)
• Temperature range: RT ~ 2000°C
• Completely mounted on DN40CF-flange, incl. wiring and electrical feedthroughs
• Eletrical Feedtroughts:
  • 4-Pin MS12 Type, CF16
    • Air-Side Connector Included (Cable Not Included)
    • Pin Material: Molybdenum
    • Maximum Voltage: 12kV
  • 1-Pin SHV Type, CF16
    • Air-Side Connector Included (Cable Not Included)
    • Maximum Voltage: 5kV
• Packaging included
• fully UHV compatible materials
• Controller not included
  

Please note that two external power supplies, not included in the scope of delivery, are required for operation of the e-beam heater.

1. High Voltage Power Supply
Recommended specifications:

• CE marked
• DC output: 0–1.5 kV
• Power: approx. 600 W
• Adjustable current limit
• Output current readback with ~1 mA resolution

Example: https://www.xppower.com/de/product/MCP700-Series

2. Low Voltage Power Supply
Recommended specifications:

• Conventional laboratory power supply, CE marked
• DC output: 0–30 V
• Power: approx. 100–200 W
• Adjustable current limit
• Output current readback

Example: https://www.distrelec.ch/de/gleichstromversorgung-programmierbar-40v-5a-200w-rs232c-cee-stecker-uk-stecker-typ-bs1363-rs-pro-1233570/p/30391444

There is no thermocouple included in this standard version. The thermocouple would be in physical/electrical contact with the sample plate. Therefore, if high sample bias voltages are applied via the ‘sample bias’ feed-through, the thermocouple connector must be disconnected unless you are using a measuring device that can cope with the bias voltage being applied.